A Hybrid Identification Procedure for Grooved Aerostatic Pads

Thanks to their zero friction, aerostatic pads are currently used in many high precision applications. They can be modelled through distributed or lumped parameter models. The accuracy of lumped parameter models is strictly related to their structure and topology. This paper proposes a lumped parameter model for grooved aerostatic pads with a novel identification procedure. The proposed identification procedure is based on the equations of the lumped parameter model and experimental data of a grooved pad.