An AI-Enabled Framework for Smart Semiconductor Manufacturing

With the rise of Machine Learning (ML) and Artificial Intelligence (AI), the semiconductor industry is undergoing a revolution in how it approaches manufacturing. The SMART-IC project (DATE'24 MPP category: initial stage) works in this direction, by proposing an AI-enabled framework to support the smart monitoring and optimization of the semiconductor manufacturing process. An AI-powered engine examines sensor data recording physical parameters during production (like gas flow, temperature, voltage, etc.) as well as test data, with different goals: (1) the identification of anomalies in the production chain, either offline from collected data-traces or online from a continuous stream of sensed data; (2) the forecasting of new data of the future production; and (3) the automatic generation of synthetic traces, to strengthen the data-based algorithms. All such tasks provide valuable information to an advanced MES, which reacts by optimizing the production process and management of the equipment maintenance policies. SMART-IC is a 300keuro academic project funded by the Italian Ministry of University and supported by STMicroelectronics and Technoprobe with industrial expertise and real-world applications. This paper shares the view of SMART-IC on the future of semiconductor manufacturing, the preliminary efforts, and the future results that will be reached by the end of the project, in 2025.