An Analysis of Surface Acoustic Wave Modes of a Finite Solid Covered with Electrodes by Rayleigh-Ritz Method

The surface acoustic waves (SAW) velocity is usually obtained by analyzing vibrations of the structure of surface acoustic wave resonators with the approximate and finite element methods. In this study, Rayleigh-Ritz method is utilized to obtain the velocity of the unit cell of a SAW resonator structure with chosen deformation functions. With a standard formulation, relatively accurate results are obtained from the approximate eigenvalue problem with the consideration of the substrate and discrete electrodes. The computational cost is relatively small in comparison with the finite element analysis, making it more desirable and preferable in selecting design tools for an efficient design procedure.