The mechanical fatigue behavior of gold microbeams is analyzed. Dedicated devices have been designed and built able to produce alternate loading on gold specimens; the electrostatic actuation is used as driving force. Gold beams are tested under both bending and tensile alternate loadings. Results were used to plot S-N curves and fatigue Goodman-Smith diagram in order to estimate the fatigue limit of the material in presence of mean and alternate stress conditions. The surface topography evolution is studied and failure modes are discussed.

Reliability of MEMS: Effects of different stress conditions and mechanical fatigue failure detection / Soma, A.; De Pasquale, G.. - (2010), pp. 72-80. ((Intervento presentato al convegno 6th International Conference of Young Scientists "Perspective Technologies and Methods in MEMS Design", MEMSTECH 2010 tenutosi a Lviv, Polyana, ukr nel 2010.

Reliability of MEMS: Effects of different stress conditions and mechanical fatigue failure detection

De Pasquale G.
2010

Abstract

The mechanical fatigue behavior of gold microbeams is analyzed. Dedicated devices have been designed and built able to produce alternate loading on gold specimens; the electrostatic actuation is used as driving force. Gold beams are tested under both bending and tensile alternate loadings. Results were used to plot S-N curves and fatigue Goodman-Smith diagram in order to estimate the fatigue limit of the material in presence of mean and alternate stress conditions. The surface topography evolution is studied and failure modes are discussed.
2010
978-1-4244-7325-0
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11583/2974783