Metrological characterization of MEMS accelerometers by LDV

In this work two calibration methodologies, able to characterize the digital sensitivity of MEMS accelerometers, are presented and compared, to identify the contributions for the evaluation of the reproducibility in the low frequency range. The methodologies are different from the point of view of test bench, test procedure and data processing method. In particular, different vibration actuators are used, a linear slide and an electro-dynamic shaker, different sensors as a reference for the calibration, piezoelectric accelerometers and a Laser Doppler Vibrometer (LDV). A group of 5 accelerometers is tested for the purpose of developing the calibration techniques and evaluate a first reproducibility estimate. The experimental results provided by the two calibration procedures show significant differences. Some elements that could explain these differences have been identified, and will be further investigated in future work.