Archivio Istituzionale della RicercaA novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low power consumption and high performance. The analytical model and the characterization of the first proof-concept device are presented.
MEMS Magnetometer Using Magnetic Flux Concentrators and Permanent Magnets / Maspero, F.; Gatani, G.; Cuccurullo, S.; Bertacco, R.. - ELETTRONICO. - (2021), pp. 374-377. (Intervento presentato al convegno 34th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2021 tenutosi a usa nel 2021) [10.1109/MEMS51782.2021.9375441].
MEMS Magnetometer Using Magnetic Flux Concentrators and Permanent Magnets
Gatani G.;
2021
Abstract
A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low power consumption and high performance. The analytical model and the characterization of the first proof-concept device are presented.
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MEMS_Magnetometer_Using_Magnetic_Flux_Concentrators_and_Permanent_Magnets.pdf
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https://hdl.handle.net/11583/2942992