Design and Analysis of an Aerostatic Pad Controlled by a Diaphragm Valve

Because of their distinctive characteristics, aerostatic bearings are particularly suitable for high-precision applications. However, because of the compressibility of the lubricant, this kind of bearing is characterized by low relative stiffness and poor damping. Compensation methods represent a valuable solution to these limitations. This paper presents a design procedure for passively compensated bearings controlled by diaphragm valves. Given a desired air gap height at which the system should work, the procedure makes it possible to maximize the stiffness of the bearing around this value. The designed bearings exhibit a quasi-static infinite stiffness for load variation ranging from 20% to almost 50% of the maximum load capacity of the bearing. Moreover, the influence of different parameters on the performance of the compensated pad is evaluated through a sensitivity analysis