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EnglishWe report on a fast soft x-ray source consisting in a high temperature small diameter (4 mm) plasma column produced by electric discharge in a ceramic capillary. This source was developed to produce pulses of few hundred nanosecond duration for EUV lithography, x ray microscopy applications and also with the aim of developing a soft x ray amplifier. We obtained experimental results concerning the intensity and spectral analysis of the emitted x radiation pumped by a 30-40 kA, 100-200 ns, electric discharge at 1 Torr pressure in Ar gas. We refer also on the spectra obtained using CO2, as plasma medium, after the optimization of the discharge setup and electrical parameters. © Society of Photo-Optical Instrumentation Engineers.
Fast collisional capillary discharge source for soft x-ray production and applications / Tomassetti, G.; Palladino, L.; Ritucci, A.; Reale, L.; Limongi, T.; Kukhlevsky, S. V.; Kaiser, J.; Flora, F.; Mezi, L.. - STAMPA. - 4504(2001), pp. 151-158. ((Intervento presentato al convegno International Symposium on Optical Science and Technology tenutosi a San Diego nel 2001 [10.1117/12.448460].
| Titolo: | Fast collisional capillary discharge source for soft x-ray production and applications | |
| Autori: | ||
| Data di pubblicazione: | 2001 | |
| Serie: | ||
| Abstract: | We report on a fast soft x-ray source consisting in a high temperature small diameter (4 mm) plas...ma column produced by electric discharge in a ceramic capillary. This source was developed to produce pulses of few hundred nanosecond duration for EUV lithography, x ray microscopy applications and also with the aim of developing a soft x ray amplifier. We obtained experimental results concerning the intensity and spectral analysis of the emitted x radiation pumped by a 30-40 kA, 100-200 ns, electric discharge at 1 Torr pressure in Ar gas. We refer also on the spectra obtained using CO2, as plasma medium, after the optimization of the discharge setup and electrical parameters. © Society of Photo-Optical Instrumentation Engineers. | |
| Appare nelle tipologie: | 4.1 Contributo in Atti di convegno |
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| FastCollisional_2001.pdf | Articolo principale | 2a Post-print versione editoriale / Version of Record | Non Pubblico - Accesso privato/ristretto | Administrator Richiedi una copia |
http://hdl.handle.net/11583/2852576
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