This paper investigates the features of different techniques to model the dynamic behaviour of microbeams electrostatically actuated to identify the frequency shifting due to the electromechanical coupling. A first model with a single degree of freedom of double clamped microbeam is investigated: the analytic solution of the linearized equation of motion is compared to the numerical one of the nonlinear problem, solved by the Newmark method. FEM models are then introduced and compared to Newmark numerical integrations. A new procedure for a fast estimation of the frequency has been developed: a parabolic curve (frequency vs. voltage) approximates the actual characteristic by means of two interpolation points, corresponding to the steady-state frequency (pure mechanical actuation) and to a generic voltage, for which the Newmark method is applied once.

Dynamics modeling of microbeams under electrostatic load / Brusa, E.; De Bona, F.; Gugliotta, A.; Soma, A.. - STAMPA. - 1:(2003), pp. 181-186. (Intervento presentato al convegno 5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003 tenutosi a INGLESE nel 2003) [10.1109/DTIP.2003.1287032].

Dynamics modeling of microbeams under electrostatic load

Brusa E.;Gugliotta A.;Soma A.
2003

Abstract

This paper investigates the features of different techniques to model the dynamic behaviour of microbeams electrostatically actuated to identify the frequency shifting due to the electromechanical coupling. A first model with a single degree of freedom of double clamped microbeam is investigated: the analytic solution of the linearized equation of motion is compared to the numerical one of the nonlinear problem, solved by the Newmark method. FEM models are then introduced and compared to Newmark numerical integrations. A new procedure for a fast estimation of the frequency has been developed: a parabolic curve (frequency vs. voltage) approximates the actual characteristic by means of two interpolation points, corresponding to the steady-state frequency (pure mechanical actuation) and to a generic voltage, for which the Newmark method is applied once.
2003
0-7803-7066-X
File in questo prodotto:
File Dimensione Formato  
DTIP2003.pdf

non disponibili

Descrizione: Paper published
Tipologia: 2a Post-print versione editoriale / Version of Record
Licenza: Non Pubblico - Accesso privato/ristretto
Dimensione 385.26 kB
Formato Adobe PDF
385.26 kB Adobe PDF   Visualizza/Apri   Richiedi una copia
Pubblicazioni consigliate

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11583/2783212