FEM Modeling and experimental testing of notched MEMS specimen

This paper presents the simulation of specifically MEMS specimen in the presence of stress concentration factor due to notches. FEM models are realized to study the effect of notch geometric parameters on the stress concentration factor of the gold specimen subjected to tensile loading. Test structures without notch, and with single notch are modeled and realized Maximum axial stresses produced in the specimens and the corresponding stress concentration factors for the notched specimens are obtained using FEM modeling. Realized test structure has been firstly experimentally tested by using profilometers measurements. A first identification of the numerical FEM model is obtained by comparison of the central deflection of the specimen with the central deflection of the measured notched specimen.