This paper presents the design, FEM modeling and experimental characterization of the elastic-plastic behavior of electroplated gold specimens undergoing tensile loading. The test structures are designed and optimized to achieve high stress values in the double-clamped specimen with a rectangular crosssection in the middle of the test structure. High stresses in the specimen are achieved by using electrostatic actuation to the plates, constrained using hinges. The range of electrostatic actuation is increased using bottom partial-plate electrodes on the substrate. The static deflection of the central specimen in the test structures under multiple loading cycles is obtained using experimental characterization and a change in the static pull-in voltage with each loading cycle is observed evaluating the permanent strain due to plasticity.
Experimental characterization of elastic-plastic behavior of MEMS electroplated gold specimens / Soma', Aurelio; Saleem, M. M.; Margesin, B.. - ELETTRONICO. - (2017), pp. 1-4. (Intervento presentato al convegno DTIP 2017- 19th edition of the Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS tenutosi a Bordeaux - Francia nel 29 May - 1 June 2017) [10.1109/DTIP.2017.7984501].
Experimental characterization of elastic-plastic behavior of MEMS electroplated gold specimens
SOMA', AURELIO;
2017
Abstract
This paper presents the design, FEM modeling and experimental characterization of the elastic-plastic behavior of electroplated gold specimens undergoing tensile loading. The test structures are designed and optimized to achieve high stress values in the double-clamped specimen with a rectangular crosssection in the middle of the test structure. High stresses in the specimen are achieved by using electrostatic actuation to the plates, constrained using hinges. The range of electrostatic actuation is increased using bottom partial-plate electrodes on the substrate. The static deflection of the central specimen in the test structures under multiple loading cycles is obtained using experimental characterization and a change in the static pull-in voltage with each loading cycle is observed evaluating the permanent strain due to plasticity.Pubblicazioni consigliate
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https://hdl.handle.net/11583/2677849
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