PORTO @ 
Archivio Istituzionale della Ricerca
IRIS è la soluzione IT che facilita la raccolta e la gestione dei dati relativi alle attività e ai prodotti della ricerca. Fornisce a ricercatori, amministratori e valutatori gli strumenti per monitorare i risultati della ricerca, aumentarne la visibilità e allocare in modo efficace le risorse disponibili.
EnglishIn this work, we report a method to process porous silicon to improve its chemical resistance to alkaline solution attacks based on the functionalization of the pore surface by the electrochemical reduction of 4-nitrobenzendiazonium salt. This method provides porous silicon with strong resistance to the etching solutions used in optical lithography and allows the fabrication of tailored metallic contacts on its surface. The samples were studied by chemical, electrochemical, and morphological methods. We demonstrate that the grafted samples show a resistance to harsh alkaline solution more than three orders of magnitude larger than that of pristine porous silicon, being mostly unmodified after about 40 min. The samples maintained open pores after the grafting, making them suitable for further treatments like filling by polymers. Optical lithography was performed on the functionalized samples, and electrochemical characterization results are shown.
| Titolo: | 4-Nitrobenzene Grafted in Porous Silicon: Application to Optical Lithography |
| Autori: | |
| Data di pubblicazione: | 2016 |
| Rivista: | |
| Digital Object Identifier (DOI): | http://dx.doi.org/10.1186/s11671-016-1654-8 |
| Appare nelle tipologie: | 1.1 Articolo in rivista |
File in questo prodotto:
| File | Descrizione | Tipologia | Licenza | |
|---|---|---|---|---|
| Nanoscale Research Letters,2016, 11,436.pdf | Nanoscale Research Letters, 2016, 11, 436 | 2. Post-print / Author's Accepted Manuscript |  | Visibile a tuttiVisualizza/Apri |
http://hdl.handle.net/11583/2675414
Copyright © 2020