A new method based on the analysis of the dielectric constant in the energy range 1 – 6.2 eV for the evaluation of sp3/sp2 ratio in a-C and a-C:H films has been proposed. The method has been tested on a number of films deposited by different techniques and it has been compared with the results on sp3/sp2 ratio obtained by other technique.

A new method for evaluation of sp3/sp2 ratio in diamond-like films from optical measurements / F., Demichelis; Pirri, Candido; Tagliaferro, Alberto. - In: JOURNAL OF NON-CRYSTALLINE SOLIDS. - ISSN 0022-3093. - 137-138:(1991), pp. 839-842. ((Intervento presentato al convegno 14th International Conference on Amorphous Semiconductors - Science and Technology tenutosi a Garmisch-Partenkirchen (DEU) nel 19–23 August 1991 [10.1016/S0022-3093(05)80250-9].

A new method for evaluation of sp3/sp2 ratio in diamond-like films from optical measurements

PIRRI, Candido;TAGLIAFERRO, Alberto
1991

Abstract

A new method based on the analysis of the dielectric constant in the energy range 1 – 6.2 eV for the evaluation of sp3/sp2 ratio in a-C and a-C:H films has been proposed. The method has been tested on a number of films deposited by different techniques and it has been compared with the results on sp3/sp2 ratio obtained by other technique.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11583/1661056
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