This paper presents the experimental characterization of elastic–plastic behavior of the thin gold microstructures under an applied loading using electrostatic actuation. The test structures are designed and optimized to achieve high stress values in the double-clamped specimen with a rectangular cross-section. The stress–strain behavior and plastic strength of the microstructures is experimentally studied by measuring the static deflection of the central specimen, undergoing tensile stress, using electrostatic actuation. The tensile stress in the test specimen is estimated by the non-linear finite element method (FEM) simulations. The elastic–plastic behavior in the specimen is investigated by the repeated loading and measuring the variation in the pull-in voltage value and permanent deflection in the specimen with each loading cycle.

Pull-in tests of MEMS specimens for characterization of elastic–plastic behavior / Soma, A.; Saleem, M. M.; Margesin, B.; Armando, M.. - In: MICROSYSTEM TECHNOLOGIES. - ISSN 0946-7076. - 25:7(2019), pp. 2525-2533. [10.1007/s00542-019-04396-1]

Pull-in tests of MEMS specimens for characterization of elastic–plastic behavior

Soma A.;Saleem M. M.;
2019

Abstract

This paper presents the experimental characterization of elastic–plastic behavior of the thin gold microstructures under an applied loading using electrostatic actuation. The test structures are designed and optimized to achieve high stress values in the double-clamped specimen with a rectangular cross-section. The stress–strain behavior and plastic strength of the microstructures is experimentally studied by measuring the static deflection of the central specimen, undergoing tensile stress, using electrostatic actuation. The tensile stress in the test specimen is estimated by the non-linear finite element method (FEM) simulations. The elastic–plastic behavior in the specimen is investigated by the repeated loading and measuring the variation in the pull-in voltage value and permanent deflection in the specimen with each loading cycle.
File in questo prodotto:
File Dimensione Formato  
Somà2019_Article_Pull-inTestsOfMEMSSpecimensFor.pdf

non disponibili

Tipologia: 2a Post-print versione editoriale / Version of Record
Licenza: Non Pubblico - Accesso privato/ristretto
Dimensione 2.47 MB
Formato Adobe PDF
2.47 MB Adobe PDF   Visualizza/Apri   Richiedi una copia
Pubblicazioni consigliate

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11583/2777212