Nanoprobe tips are key components in many applications such as scanning probe microscopes, nanoscale imaging, nanofabrication and sensing. This paper describes a dynamic chemical etching method for the fabrication of optical nanoprobes. The tips are produced by mechanically rotating and dipping a silica optical fibre in a chemical etching solution (aqueous hydrofluoric acid) covered with a protection layer. Using different dynamic regimes of the mechanical movements during the chemical etching process, it is possible to vary the cone angle, the shape, and the roughness of the nanoprobes. It is found that the tip profiles are determined by the nonlinear dynamic evolution of the meniscus of the etchant near the fibre. Computational fluid dynamic simulations have been performed, showing that different flow regimes correspond to different shear forces acting on the forming nanotip, in agreement with experimental results. With this method, a high yield of reproducible nanotips can be obtained, thus overcoming the drawbacks of conventional etching techniques. Typical tip features are short taper length (∼200 μm), large cone angle (up to 40°), and small probe tip dimension (less than 30 nm).
|Titolo:||Optical fibre nanotips fabricated by a dynamic chemical etching for sensing applications|
|Data di pubblicazione:||2015|
|Digital Object Identifier (DOI):||10.1063/1.4906854|
|Appare nelle tipologie:||1.1 Articolo in rivista|