To advance neuroscience in vivo experiments, it is necessary to probe a high density of neurons in neural networks with single-cell resolution and be able to simultaneously use different techniques, such as electrophysiological recordings and optogenetic intervention, while minimizing brain tissue damage. We first fabricate electrical neural probes with a high density of electrodes and small tip profile (cross section of shank: 47-μm width  ×  16-μm thickness). Then, with similar substrate and fabrication techniques, we separately fabricate optical neural probes. We finally indicate a fabrication method that may allow integrating the two functionalities into the same device. High-density electrical probes have been fabricated with 64 pads. Interconnections to deliver the signal are 120-nm wide, and the pads are 5  ×  25  μm. Separate optical probes with similar shank dimensions with silicon dioxide and silicon nitride ridge single-mode waveguides have also been fabricated. The waveguide core cross section is 250  nm  ×  160  nm. Light is focused above the waveguide plane in 2.35-μm diameter spots. The actual probes present two output focusing gratings on the shank.

High-density electrical and optical probes for neural readout and light focusing in deep brain tissue / Lanzio, Vittorino; West, Melanie; Koshelev, Alexander; Telian, Gregory; Micheletti, Paolo; Lambert, Raquel; Dhuey, Scott; Adesnik, Hillel; Sassolini, Simone; Cabrini, Stefano. - In: JOURNAL OF MICRO/NANOLITHOGRAPHY, MEMS, AND MOEMS. - ISSN 1932-5150. - ELETTRONICO. - Vol. 17:Issue 2(2018). [10.1117/1.JMM.17.2.025503]

High-density electrical and optical probes for neural readout and light focusing in deep brain tissue

Vittorino Lanzio;Paolo Micheletti;
2018

Abstract

To advance neuroscience in vivo experiments, it is necessary to probe a high density of neurons in neural networks with single-cell resolution and be able to simultaneously use different techniques, such as electrophysiological recordings and optogenetic intervention, while minimizing brain tissue damage. We first fabricate electrical neural probes with a high density of electrodes and small tip profile (cross section of shank: 47-μm width  ×  16-μm thickness). Then, with similar substrate and fabrication techniques, we separately fabricate optical neural probes. We finally indicate a fabrication method that may allow integrating the two functionalities into the same device. High-density electrical probes have been fabricated with 64 pads. Interconnections to deliver the signal are 120-nm wide, and the pads are 5  ×  25  μm. Separate optical probes with similar shank dimensions with silicon dioxide and silicon nitride ridge single-mode waveguides have also been fabricated. The waveguide core cross section is 250  nm  ×  160  nm. Light is focused above the waveguide plane in 2.35-μm diameter spots. The actual probes present two output focusing gratings on the shank.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11583/2713695
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