We describe the first use of a novel photoresist- free X-ray nanopatterning technique to fabricate an electronic device. We have produced a proof-of-concept device consisting of a few Josephson junctions by irradiating microcrystals of the Bi2Sr2CaCu2O8+δ (Bi-2212) superconducting oxide with a 17.6 keV synchrotron nanobeam. Fully functional devices have been obtained by locally turning the material into a nonsuperconducting state by means of hard X-ray exposure. Nano-XRD patterns reveal that the crystallinity is substantially preserved in the irradiated areas that there is no evidence of macroscopic crystal disruption. Indications are that O ions have been removed from the crystals, which could make this technique interesting also for other oxide materials. Direct-write X-ray nanopatterning represents a promising fabrication method exploiting material/material rather than vacuum/material interfaces, with the potential for nanometric resolution, improved mechanical stability, enhanced depth of patterning, and absence of chemical contamination with respect to traditional lithographic techniques.

Direct-Write X-ray Nanopatterning: A Proof of Concept Josephson Device on Bi2Sr2CaCu2O8+δ Superconducting Oxide / Marco Truccato, *; Angelo Agostino, †; Elisa Borfecchia, ‡; Lorenzo Mino, ‡; Cara, Eleonora; Alessandro Pagliero, †; Nidhi Adhlakha, †; Lise Pascale, †; Lorenza Operti, ‡; Enrico, Emanuele; Natascia De Leo, §; Fretto, MATTEO ANDREA FRANCESCO; Gema Martinez Criado, §; Carlo Lamberti, ∥. - In: NANO LETTERS. - ISSN 1530-6984. - 16:3(2016), pp. 1669-1674. [10.1021/acs.nanolett.5b04568]

Direct-Write X-ray Nanopatterning: A Proof of Concept Josephson Device on Bi2Sr2CaCu2O8+δ Superconducting Oxide

CARA, ELEONORA;ENRICO, EMANUELE;FRETTO, MATTEO ANDREA FRANCESCO;
2016

Abstract

We describe the first use of a novel photoresist- free X-ray nanopatterning technique to fabricate an electronic device. We have produced a proof-of-concept device consisting of a few Josephson junctions by irradiating microcrystals of the Bi2Sr2CaCu2O8+δ (Bi-2212) superconducting oxide with a 17.6 keV synchrotron nanobeam. Fully functional devices have been obtained by locally turning the material into a nonsuperconducting state by means of hard X-ray exposure. Nano-XRD patterns reveal that the crystallinity is substantially preserved in the irradiated areas that there is no evidence of macroscopic crystal disruption. Indications are that O ions have been removed from the crystals, which could make this technique interesting also for other oxide materials. Direct-write X-ray nanopatterning represents a promising fabrication method exploiting material/material rather than vacuum/material interfaces, with the potential for nanometric resolution, improved mechanical stability, enhanced depth of patterning, and absence of chemical contamination with respect to traditional lithographic techniques.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/11583/2675407
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