We describe the first use of a novel photoresist- free X-ray nanopatterning technique to fabricate an electronic device. We have produced a proof-of-concept device consisting of a few Josephson junctions by irradiating microcrystals of the Bi2Sr2CaCu2O8+δ (Bi-2212) superconducting oxide with a 17.6 keV synchrotron nanobeam. Fully functional devices have been obtained by locally turning the material into a nonsuperconducting state by means of hard X-ray exposure. Nano-XRD patterns reveal that the crystallinity is substantially preserved in the irradiated areas that there is no evidence of macroscopic crystal disruption. Indications are that O ions have been removed from the crystals, which could make this technique interesting also for other oxide materials. Direct-write X-ray nanopatterning represents a promising fabrication method exploiting material/material rather than vacuum/material interfaces, with the potential for nanometric resolution, improved mechanical stability, enhanced depth of patterning, and absence of chemical contamination with respect to traditional lithographic techniques.
Direct-Write X-ray Nanopatterning: A Proof of Concept Josephson Device on Bi2Sr2CaCu2O8+δ Superconducting Oxide / Marco Truccato, *; Angelo Agostino, †; Elisa Borfecchia, ‡; Lorenzo Mino, ‡; Eleonora Cara, §; Alessandro Pagliero, †; Nidhi Adhlakha, †; Lise Pascale, †; Lorenza Operti, ‡; Emanuele Enrico, ‡; Natascia De Leo, §; Matteo Fretto, §; Gema Martinez-Criado, §; and Carlo Lamberti, ∥. - In: NANO LETTERS. - ISSN 1530-6984. - 16:3(2016), pp. 1669-1674.
|Titolo:||Direct-Write X-ray Nanopatterning: A Proof of Concept Josephson Device on Bi2Sr2CaCu2O8+δ Superconducting Oxide|
|Data di pubblicazione:||2016|
|Digital Object Identifier (DOI):||http://dx.doi.org/10.1021/acs.nanolett.5b04568|
|Appare nelle tipologie:||1.1 Articolo in rivista|
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