Imprinting micro structures on glass in conventional furnace instead of vacuum chamber was carried out using a nickel alloy mold which was fabricated by diode-pumped solid state laser writing. The layout is designed to serve for DNA analysis. In the development of such micro-fluidics structures, the processing frequency, power, scan speed and pass number are found to be key parameter for obtaining good quality surface and enough depth of channels on master. Studies on these parameters were carried out and the optimal combination of them was determined. Both morphological and structural surface modifications of Ni alloy have been investigated by Field Effect Scanning Electron Microscopy, Energy Dispersive X-ray (EDX) and micro profilometer 2D. This study aims to obtain a low cost and high efficient microfluidic chip for lab-on-chip application.

Fabrication of microstructures on glass by imprinting in conventional furnace for lab-on-chip application / Chen, Qiuling; Chen, Qiuping; Maccioni, Gabriele; Sacco, Adriano; Ferrero, Sergio; Scaltrito, Luciano. - In: MICROELECTRONIC ENGINEERING. - ISSN 0167-9317. - 95:(2012), pp. 90-101. [10.1016/j.mee.2012.01.007]

Fabrication of microstructures on glass by imprinting in conventional furnace for lab-on-chip application

CHEN, QIULING;CHEN, QIUPING;MACCIONI, GABRIELE;SACCO, ADRIANO;FERRERO, SERGIO;SCALTRITO, LUCIANO
2012

Abstract

Imprinting micro structures on glass in conventional furnace instead of vacuum chamber was carried out using a nickel alloy mold which was fabricated by diode-pumped solid state laser writing. The layout is designed to serve for DNA analysis. In the development of such micro-fluidics structures, the processing frequency, power, scan speed and pass number are found to be key parameter for obtaining good quality surface and enough depth of channels on master. Studies on these parameters were carried out and the optimal combination of them was determined. Both morphological and structural surface modifications of Ni alloy have been investigated by Field Effect Scanning Electron Microscopy, Energy Dispersive X-ray (EDX) and micro profilometer 2D. This study aims to obtain a low cost and high efficient microfluidic chip for lab-on-chip application.
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/11583/2496191
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