This work is focused on the developing of silicon resonant microcantilevers for the measurement of the absolute pressure. The microcantilevers have been fabricated with a two-mask bulk micromachining process. The variation in resonance response of microcantilevers was investigated as a function of pressure 10−1–105 Pa, both in terms of resonance frequency and quality factor. A theoretical description of the resonating microstructure is given according to different molecular and viscous regimes. Also a brief discussion on the different quality factors contributions is presented. Theoretical and experimental data show a very satisfying agreement. The microstructure behavior demonstrates a certain sensitivity over a six decade range and the potential evolution of an absolute pressure sensor working in the same range.
Silicon resonant microcantilevers for absolute pressure measurement / BIANCO S.; M. COCUZZA; S. FERRERO; E. GIURI; G. PIACENZA; C.F. PIRRI; A. RICCI; L. SCALTRITO; D. BICH; A. MERIALDO; P. SCHINA; R. CORREALE. - In: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. B. - ISSN 1071-1023. - STAMPA. - 24:4(2006), pp. 1083-1089. [10.1116/1.2214698]
Titolo: | Silicon resonant microcantilevers for absolute pressure measurement | |
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Data di pubblicazione: | 2006 | |
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Digital Object Identifier (DOI): | http://dx.doi.org/10.1116/1.2214698 | |
Appare nelle tipologie: | 1.1 Articolo in rivista |
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Silicon resonant microcantilevers.pdf | 1. Preprint / submitted version [pre- review] | PUBBLICO - Tutti i diritti riservati | Visibile a tuttiVisualizza/Apri |
http://hdl.handle.net/11583/1648789