This work is focused on the developing of silicon resonant microcantilevers for the measurement of the absolute pressure. The microcantilevers have been fabricated with a two-mask bulk micromachining process. The variation in resonance response of microcantilevers was investigated as a function of pressure 10−1–105 Pa, both in terms of resonance frequency and quality factor. A theoretical description of the resonating microstructure is given according to different molecular and viscous regimes. Also a brief discussion on the different quality factors contributions is presented. Theoretical and experimental data show a very satisfying agreement. The microstructure behavior demonstrates a certain sensitivity over a six decade range and the potential evolution of an absolute pressure sensor working in the same range.
|Titolo:||Silicon resonant microcantilevers for absolute pressure measurement|
|Data di pubblicazione:||2006|
|Digital Object Identifier (DOI):||10.1116/1.2214698|
|Appare nelle tipologie:||1.1 Articolo in rivista|