Archivio Istituzionale della RicercaHydrogenated amorphous carbon thin films have attracted great interest because of their mechanical, electrical and optical properties. Many techniques have been used to produce films with good properties. The present work reports on a comparison between films of high hardness deposited both by glow discharge and sputtering. All the films have been characterized by structural, optical and electrical measurements. Analogies and differences in the structure of the samples obtained by the two methods are discussed.
Comparison of diamond-like carbon films having similar hardness deposited by glow discharge and sputtering / Demichelis, F.; Pirri, Candido; Tagliaferro, Alberto; Barbarossa, V.; Mercuri, S.; Tomaciello, R.. - In: DIAMOND AND RELATED MATERIALS. - ISSN 0925-9635. - 1:5-6(1992), pp. 535-535. [10.1016/0925-9635(92)90159-L]
Comparison of diamond-like carbon films having similar hardness deposited by glow discharge and sputtering
PIRRI, Candido;TAGLIAFERRO, Alberto;
1992
Abstract
Hydrogenated amorphous carbon thin films have attracted great interest because of their mechanical, electrical and optical properties. Many techniques have been used to produce films with good properties. The present work reports on a comparison between films of high hardness deposited both by glow discharge and sputtering. All the films have been characterized by structural, optical and electrical measurements. Analogies and differences in the structure of the samples obtained by the two methods are discussed.
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https://hdl.handle.net/11583/1406411
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